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Determination of Clean Room Design Parameters

Determination of Clean Room Design Parameters

1. Determine the ventilation parameters and cleanliness level of clean room air conditioning

1) Due to different production processes, different requirements for cleanliness levels, and different air conditioning and ventilation parameters, designers should first understand the characteristics of each production process.

2) Characteristics of electronic factory production process:

(1) Due to the wide variety of production processes, the cleanliness level requirements are different, the high is very high, the low is very low: the requirements for particle size control are also different, 0.1μm~5μm. The requirements for temperature and humidity control are relatively high, such as the integrated circuit before the process generally requires the indoor temperature base of 22 ° C, the accuracy of 0.1 ° C ~ 1 ° C; The relative humidity base is 40%, and the accuracy is 2%~ 5%. The gradient level required by the positive pressure value is 5~10Pa from high to low with the change of cleanliness.

(2) The cooling load is much larger than that of clean rooms in other industries. Unit cooling load of 400w/m2 and 500w/m2 are common. Due to the large cooling load, the general situation is sinking, and the winter also needs to be cooled to become the characteristics of the electronics industry.

(3) There are many kinds of toxic and harmful gases produced by the production process, and the amount is also large, so the exhaust air volume is also large, and the new air volume is also large. The energy-saving measures of the new exhaust air are also one of the characteristics, which should be treated before discharge and meet the requirements of environmental protection.

(4) The production process has the requirements of antistatic and anti-vibration.

(5) There are many types of bulk gases and special gases, and high purity and cleanliness requirements.

3) Biological clean room

Including pharmaceutical industry, food industry, cosmetics industry, hospitals (operating rooms, burn units, leukemia wards, etc.), laboratories, etc.

Biological clean room features are:

(1) To control microorganisms into the biological clean room, there are generally two methods of filtration and sterilization and disinfection.

(2) Due to the high efficiency filter resistance, the price is expensive, for the general biological clean room with low requirements, the use of this filter is not suitable.

(3) From the point of view of bacterial equivalent diameter, it is also feasible to use a sub-high efficiency filter or a medium efficiency filter with a filtration efficiency close to high efficiency.

(4) For viruses, although it is much smaller than bacteria, but it does not have a complete enzyme system, and bacteria, can not metabolize material alone, can not grow on the inanimate medium, and must be parasitic in a living cell to reproduce.

(5) Therefore, it also has a carrier in the air, and it can be considered that it exists in the form of a group, so it is unnecessary to worry that the high efficiency filter can not filter the virus. Therefore, for biological clean rooms, what kind of filter is used and its promotion and application are very important.

 2. Division principle of clean room air conditioning system

Clean room air cleanliness level should be determined according to the characteristics and requirements of the production process, and select the appropriate air flow organization, different cleanliness levels, different air flow organization forms of clean air conditioning system should be set separately.

In the following cases, clean air conditioning systems should be set separately:

1) Process rooms with different operating shifts or different use times should not be divided into a clean air conditioning system, which is to avoid the waste caused by the non-working clean room being the same clean air conditioning system as the working clean room and cannot be closed, which increases the operating cost. If the air conditioning system is set separately, the non-working clean room can only run the on-duty fan. This reduces operating costs.

2) The substances distributed in the production process will cause cross-contamination of other processes and equipment, which will affect the quality of the product or the health and safety of the operator. The clean room air conditioning system of different processes should be set separately, and the clean room that will cause cross-contamination is available in electronics factories, pharmaceutical factories and various laboratories.

3) The clean room air conditioning system with large difference in temperature and humidity base and precision requirements should be set separately, if not set separately, it is generally determined by the process with high base requirements and strict precision requirements, which will cause the process to have low temperature and humidity requirements, which will not only increase the initial investment, but also the operating costs will be high.

4) The system with a wide difference in the heat output of the clean room process should be set separately, because the air supply volume of the clean air conditioning system is determined according to the level of cleanliness or cold and heat load. If the heat output difference is large, then the clean room with a small heat output needs secondary heating to meet the indoor temperature requirements, resulting in waste and increasing the operating cost.

5) Clean air conditioning system and general air conditioning system should be set separately, because the general air conditioning system has no cleanliness requirements, 56 air does not need to go through three levels (primary, middle, high) filtration, if combined into a system, the initial investment and operating costs will increase.

6) The clean air conditioning system with excessive air volume should be set separately.

7) The fresh air volume is particularly large (due to the large exhaust volume of the process), the clean air conditioning system with high indoor humidity requirements, and the fresh air independent setting system, such as the clean room humidity requirements are high and the indoor humidity is not large, dehumidification measures should be taken when the fresh air is treated.